Time of flight secondary ion mass spectrometry: a powerful high throughput screening tool.

Combinatorial materials libraries are becoming more complicated; successful screening of these libraries requires the development of new high throughput screening methodologies. Time of flight secondary ion mass spectrometry (ToF-SIMS) is a surface analytical technique that is able to detect and image all elements (including hydrogen which is problematic for many other analysis instruments) and molecular fragments, with high mass resolution, during a single measurement. Commercial ToF-SIMS instruments can image 500 microm areas by rastering the primary ion beam over the region of interest. In this work, we will show that large area analysis can be performed, in one single measurement, by rastering the sample under the ion beam. We show that an entire 70 mm diameter wafer can be imaged in less than 90 min using ToF-SIMS stage (macro)rastering techniques. ToF-SIMS data sets contain a wealth of information since an entire high mass resolution mass spectrum is saved at each pixel in an ion image. Multivariate statistical analysis (MVSA) tools are being used in the ToF-SIMS community to assist with data interpretation; we will demonstrate that MVSA tools provide details that were not obtained using manual (univariate) analysis.

[1]  H. W. Werner,et al.  Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends , 1987 .

[2]  Scott E. Martin,et al.  Molecule-specific imaging with mass spectrometry and a buckminsterfullerene probe: application to characterizing solid-phase synthesized combinatorial libraries. , 2004, Journal of the American Chemical Society.

[3]  B D Ratner,et al.  Characterization of combinatorially designed polyarylates by time-of-flight secondary ion mass spectrometry. , 2000, Rapid communications in mass spectrometry : RCM.

[4]  James Anthony Ohlhausen,et al.  Multivariate statistical analysis of time-of-flight secondary ion mass spectrometry images—looking beyond the obvious , 2004 .

[5]  K. Wittmaack,et al.  Effect of water treatment on analyte and matrix ion yields in matrix-assisted time-of-flight secondary ion mass spectrometry: the case of insulin in and on hydroxycinnamic acid. , 2002, Rapid communications in mass spectrometry : RCM.

[6]  H. Bernas,et al.  GIANT METAL SPUTTERING YIELDS INDUCED BY 20-5000 KEV/ATOM GOLD CLUSTERS , 1998 .

[7]  David Touboul,et al.  Improvement of biological time-of-flight-secondary ion mass spectrometry imaging with a bismuth cluster ion source , 2005, Journal of the American Society for Mass Spectrometry.

[8]  N. Winograd,et al.  Applicability of imaging time-of flight secondary ion MS to the characterization of solid-phase synthesized combinatorial libraries. , 2003, Analytical chemistry.

[9]  Michael R. Keenan,et al.  Multivariate statistical analysis of time-of-flight secondary ion mass spectrometry images using AXSIA , 2004 .

[10]  A. Karim,et al.  Multifunctional ToF-SIMS: combinatorial mapping of gradient energy substrates , 2002 .

[11]  G. Gillen,et al.  Molecular ion imaging and dynamic secondary ion mass spectrometry of organic compounds. , 1990, Analytical chemistry.

[12]  Nicholas Lockyer,et al.  A C60 primary ion beam system for time of flight secondary ion mass spectrometry: its development and secondary ion yield characteristics. , 2003, Analytical chemistry.

[13]  P. Kotula,et al.  Using time-of-flight secondary ion mass spectrometry and multivariate statistical analysis to detect and image octabenzyl-polyhedral oligomeric silsesquioxane in polycarbonate , 2006 .

[14]  John C. Vickerman,et al.  ToF-SIMS : surface analysis by mass spectrometry , 2001 .

[15]  P. Kotula,et al.  Multivariate statistical analysis of concatenated time-of-flight secondary ion mass spectrometry spectral images. Complete description of the sample with one analysis. , 2005, Analytical chemistry.

[16]  Radislav A. Potyrailo,et al.  High-Throughput Analysis , 2003 .

[17]  A. Ewing,et al.  Spatially resolved detection of attomole quantities of organic molecules localized in picoliter vials using time-of-flight secondary ion mass spectrometry. , 1999, Analytical chemistry.

[18]  Radislav A. Potyrailo,et al.  Combinatorial and High-Throughput Discovery and Optimization of Catalysts and Materials , 2006 .

[19]  G. Gillen,et al.  Depth profiling of 4-acetamindophenol-doped poly(lactic acid) films using cluster secondary ion mass spectrometry. , 2004, Analytical chemistry.

[20]  Alamgir Karim,et al.  Time-of-flight secondary ion mass spectrometry (TOF-SIMS) for high-throughput characterization of biosurfaces , 2003 .