A Measurement Method of Microsphere with Dual Scanning Probes

The probe tip of a micro-coordinate Measuring Machine (micro-CMM) is a microsphere with a diameter of hundreds of microns, and its sphericity is generally controlled within tens to hundreds of nanometers. However, the accurate measurement of the microsphere morphology is difficult because of the small size and high precision requirement. In this study, a measurement method with two scanning probes is proposed to obtain dimensions including the diameter and sphericity of microsphere. A series of maximum cross-sectional profiles of the microsphere in different angular directions are scanned simultaneously and differently by the scanning probes. By integrating the data of these maximum profiles, the dimensions of the microsphere can be calculated. The scanning probe is fabricated by combining a quartz tuning fork and a tungsten tip, which have a fine vertical resolution at a sub-nano scale. A commercial ruby microsphere is measured with the proposed method. Experiments that involve the scanning of six section profiles are carried out to estimate the dimensions of the ruby microsphere. The repeatability error of one section profile is 15.1 nm, which indicates that the measurement system has favorable repeatability. The mainly errors in the measurement are eliminated. The measured diameter and roundness are all consistent with the size standard of the commercial microsphere. The measurement uncertainty is evaluated, and the measurement results show that the method can be used to measure the dimensions of microspheres effectively.