A Two-DOF Ultrasonic Motor Using a Longitudinal–Bending Hybrid Sandwich Transducer

A two-degrees-of-freedom (two-DOF) ultrasonic motor, which could output linear motions with two-DOF by using only one longitudinal–bending hybrid sandwich transducer, is proposed and tested in this paper. The motion in the horizontal (X) direction is achieved by the hybrid of the second longitudinal and fifth bending vibrations of the motor, while the motion in the vertical (Y) direction is gained by the composition of two orthogonal fifth bending vibrations. The proposed ultrasonic motor is designed and the principles for the two-DOF driving were analyzed. Then, the simulation analyses of the motor are accomplished to verify the described principles. Finally, a prototype is fabricated and its mechanical output characteristics are tested. The results indicate that the maximum no-load velocities of the motor in horizontal and vertical directions are 572 and 543 mm/s under the preload of 100 N and the voltage of 300 Vp-p, respectively. The maximum output forces in horizontal and vertical directions are 24 and 22 N when the preload is 200 N. The simulation and experiment results verify the feasibility of the proposed two-DOF ultrasonic motor.

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