论文信息 - Stress‐dislocation management in MOVPE of GaN on SiC wafers - 字舞流文

Stress‐dislocation management in MOVPE of GaN on SiC wafers

E. V. Yakovlev | A. V. Sakharov | A. F. Tsatsulnikov | W. Lundin | E. Zavarin | M. Rudinsky | L. E. Velikovskiy