论文信息 - Growth AlxGa1−xN films on Si substrates by magnetron sputtering and high ammoniated two-step method - 字舞流文

Growth AlxGa1−xN films on Si substrates by magnetron sputtering and high ammoniated two-step method

Zhiyong Zhang | Kaige Wang | Wang Xuewen | Wu Zhao | Feng Hu | Shuang Wang | Lin He | Xingxing Su | Lewan He