Low loss photoinduced waveguides in rapid thermally annealed films of chalcogenide glasses

Rapid thermal annealing of sputter-deposited chalcogenide glasses is demonstrated to yield superior quality films which are used to fabricate low loss (<0.3 dB/cm) photoinduced channel waveguides in chalcogenide glasses. This process also enhances the photosensitivity and the magnitude of photoinduced index changes possible (Δn∼5%) in these glass systems.