Chemical vapor deposition growth of a periodic array of single-layer MoS2 islands via lithographic patterning of an SiO2/Si substrate

The growth of micron-scale single-layer MoS2 islands is seeded and distributed at high fidelity by means of a regular array of micron-scale holes that extend through the oxide layer of a 300 nm SiO2/Si substrate. Low coverages exhibit individual sub-micron MoS2 islands directly adjacent to the seed positions. At moderate coverage the seed holes are encircled by merged MoS2 islands, whose overall shape and internal grain boundaries reveal coalescence out of several initial crystallites. Seeded islands are strictly monolayer in height, non-overlapping and they offer high photoluminescence as well as conventional Raman signatures.

[1]  T. Ohta,et al.  Electronic hybridization of large-area stacked graphene films. , 2013, ACS nano.

[2]  Bin Liu,et al.  Hysteresis in single-layer MoS2 field effect transistors. , 2012, ACS nano.

[3]  Gang Hee Han,et al.  Seeded growth of highly crystalline molybdenum disulphide monolayers at controlled locations , 2015, Nature Communications.

[4]  M. Dresselhaus,et al.  Synthesis and transfer of single-layer transition metal disulfides on diverse surfaces. , 2013, Nano letters.

[5]  J. Shan,et al.  Atomically thin MoS₂: a new direct-gap semiconductor. , 2010, Physical review letters.

[6]  A. Gruverman,et al.  Toward Ferroelectric Control of Monolayer MoS2. , 2015, Nano letters.

[7]  Xiaodong Xu,et al.  Vapor-solid growth of high optical quality MoS₂ monolayers with near-unity valley polarization. , 2013, ACS nano.

[8]  T. Heinz,et al.  2‐Dimensional Transition Metal Dichalcogenides with Tunable Direct Band Gaps: MoS2(1–x)Se2x Monolayers , 2014, Advanced materials.

[9]  Phong Nguyen,et al.  Controlled, defect-guided, metal-nanoparticle incorporation onto MoS2 via chemical and microwave routes: electrical, thermal, and structural properties. , 2013, Nano letters.

[10]  Hugen Yan,et al.  Anomalous lattice vibrations of single- and few-layer MoS2. , 2010, ACS nano.

[11]  Qing Hua Wang,et al.  Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. , 2012, Nature nanotechnology.

[12]  E. Johnston-Halperin,et al.  Progress, challenges, and opportunities in two-dimensional materials beyond graphene. , 2013, ACS nano.

[13]  Michael S. Fuhrer,et al.  High mobility ambipolar MoS2 field-effect transistors: Substrate and dielectric effects , 2012, 1212.6292.

[14]  A. Splendiani,et al.  Emerging photoluminescence in monolayer MoS2. , 2010, Nano letters.

[15]  J. Kong,et al.  Integrated circuits based on bilayer MoS₂ transistors. , 2012, Nano letters.

[16]  A. Kis,et al.  Nonvolatile memory cells based on MoS2/graphene heterostructures. , 2013, ACS nano.

[17]  P. Jeon,et al.  MoS2 nanosheets for top-gate nonvolatile memory transistor channel. , 2012, Small.

[18]  Arindam Ghosh,et al.  Nature of electronic states in atomically thin MoS₂ field-effect transistors. , 2011, ACS nano.

[19]  Hua Zhang,et al.  The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets. , 2013, Nature chemistry.

[20]  Pinshane Y. Huang,et al.  High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity , 2015, Nature.

[21]  Arka Majumdar,et al.  Monolayer semiconductor nanocavity lasers with ultralow thresholds , 2015, Nature.

[22]  J. Bao,et al.  Growth of Single Crystal Graphene Arrays by Locally Controlling Nucleation on Polycrystalline Cu Using Chemical Vapor Deposition , 2011, Advanced materials.

[23]  Lain‐Jong Li,et al.  Synthesis of Large‐Area MoS2 Atomic Layers with Chemical Vapor Deposition , 2012, Advanced materials.

[24]  J. Shan,et al.  Experimental demonstration of continuous electronic structure tuning via strain in atomically thin MoS2. , 2013, Nano letters.

[25]  Timothy C. Berkelbach,et al.  Grains and grain boundaries in highly crystalline monolayer molybdenum disulphide. , 2013, Nature Materials.

[26]  Yi Liu,et al.  Controlled Scalable Synthesis of Uniform, High-Quality Monolayer and Few-layer MoS2 Films , 2013, Scientific Reports.

[27]  L. Lauhon,et al.  Gate-tunable memristive phenomena mediated by grain boundaries in single-layer MoS2. , 2015, Nature nanotechnology.

[28]  S. Pei,et al.  Control and characterization of individual grains and grain boundaries in graphene grown by chemical vapour deposition. , 2010, Nature materials.

[29]  A. Radenović,et al.  Single-layer MoS2 transistors. , 2011, Nature nanotechnology.

[30]  J. Eroms,et al.  A direct comparison of CVD-grown and exfoliated MoS2 using optical spectroscopy , 2013, 1310.8470.

[31]  Kangho Lee,et al.  High‐Performance Sensors Based on Molybdenum Disulfide Thin Films , 2013, Advanced materials.

[32]  Facile growth of monolayer MoS2 film areas on SiO2 , 2013 .