论文信息 - Direct nitridation of 4H-SiC(0001) surface by H2/N2 treatment - 字舞流文

Direct nitridation of 4H-SiC(0001) surface by H2/N2 treatment

H. Tsuchida | K. Murata | T. Fujii | H. Tsuji | A. Takigawa | D. Mori