Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications
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Philippe Lutz | Cédric Clévy | Huikai Xie | Kanty Rabenorosoa | Bilal Komati | Sean R. Samuelson | K. Rabenorosoa | P. Lutz | Huikai Xie | S. Samuelson | C. Clévy | A. Espinosa | B. Komati | X. Zhang | A. Espinosa | X. Zhang
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