Electron spin resonance in 2 mm range of transmutation phosphorus impurity in 6H-SiC

The method of neutron transmutation doping was used to introduce phosphorus into 6H-SiC single crystals. An investigation carried out at T = 4.2 K revealed two ESR spectra attributed to isolated phosphorus ions in the cubic and hexagonal sites of the lattice. The parameters of these spectra were determined. A study was made of the dynamics of changes in the ESR spectra of phosphorus and nitrogen at temperatures from 4.2 to 73 K. The ionization energy of phosphorus was less than the ionization energy of nitrogen, and the former energy was higher at the hexagonal than at the cubic site