250nmAlGaN light-emitting diodes

We report AlGaN deep ultraviolet light-emitting diodes (LEDs) at 250 and 255nm that have short emission wavelengths. For an unpackaged 200×200μm square geometry LED emitting at 255nm, we measured a peak power of 0.57mW at 1000mA of pulsed pump current. For a similar device emitting at 250nm the peak output power of 0.16mW was measured at 300mA of pulsed pump current. Progress is based on the development of high quality AlGaN cladding layers with an Al content up to 72%, which were grown over AlGaN∕AlN superlattice buffer layers on sapphire substrates. These n-Al0.72Ga0.28N layers were doped with Si up to about 1×1018cm−3 and electron mobilities up to 50cm2∕V∙s were estimated. High resolution x-ray diffraction studies gave a narrow (002) rocking curve with full width at half maximum of only 133arcsec.