급속냉각이 가능한 고온 엠보싱 나노식각 장비용 열판의 설계

A hot plate device has been designed as a thermal treatment tool for the press-type hot embossing machine which copies the nanopatterns on stamp to polymer substrate. Design goal is to achieve the performance of rapid heating and cooling as well as high temperature uniformity and the strength to endure high stamping pressure. Analysis of design requirements leads to a new hot plate configuration having cooling holes and catridge heaters which are straight and arranged in parallel for extensibility toward large area. Numerical computations have been conducted for assessing the feasibility of the proposed design cencept and for determining the optimal distribution of heating and cooling elements. The numerical results and raised issues are scrutinized in view of accomplishment of rapid heating and cooling together with high temperature uniformity.