Exploring different inelastic projection mechanisms for electron tomography.

Several different projection mechanisms that all make use of inelastically scattered electrons are used for electron tomography. The advantages and the disadvantages of these methods are compared to HAADF-STEM tomography, which is considered as the standard electron tomography technique in materials science. The different inelastic setups used are energy filtered transmission electron microscopy (EFTEM), thickness mapping based on the log-ratio method and bulk plasmon mapping. We present a comparison that can be used to select the best inelastic signal for tomography, depending on different parameters such as the beam stability and nature of the sample. The appropriate signal will obviously also depend on the exact information which is requested.

[1]  X. Tao,et al.  Synthesis and characterization of Cu filled carbon nanohorns , 2007 .

[2]  Jan Sijbers,et al.  Quantitative Three-Dimensional Reconstruction of Catalyst Particles for Bamboo-like Carbon Nanotubes , 2007 .

[3]  Peter Hawkes,et al.  The Electron Microscope as a Structure Projector , 2007 .

[4]  P. Midgley,et al.  The chemical application of high-resolution electron tomography: bright field or dark field? , 2004, Angewandte Chemie.

[5]  P. Buffat,et al.  Size effect on the melting temperature of gold particles , 1976 .

[6]  P. Midgley,et al.  3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography. , 2003, Ultramicroscopy.

[7]  G. Kothleitner,et al.  Quantitative analysis of EFTEM elemental distribution images , 1997 .

[8]  Gustaaf Van Tendeloo,et al.  Three-Dimensional Analysis of Carbon Nanotube Networks in Interconnects by Electron Tomography without Missing Wedge Artifacts , 2010, Microscopy and Microanalysis.

[9]  D. Mitchell.  Determination of mean free path for energy loss and surface oxide film thickness using convergent beam electron diffraction and thickness mapping: a case study using Si and P91 steel , 2006, Journal of microscopy.

[10]  P. Crozier.  Measurement of inelastic electron scattering cross-sections by electron energy-loss spectroscopy , 1990 .

[11]  Joachim Frank,et al.  Electron Tomography , 1992, Springer US.

[12]  B. Inkson,et al.  Spectroscopic electron tomography. , 2003, Ultramicroscopy.

[13]  B. Rand,et al.  Quantitative valence plasmon mapping in the TEM: viewing physical properties at the nanoscale. , 2003, Ultramicroscopy.

[14]  R. Egerton,et al.  Measurement of local thickness by electron energy-loss spectroscopy , 1987 .

[15]  D. Muller,et al.  Three-dimensional imaging of nonspherical silicon nanoparticles embedded in silicon oxide by plasmon tomography , 2006 .

[16]  D. J. De Rosier,et al.  Reconstruction of Three Dimensional Structures from Electron Micrographs , 1968, Nature.

[17]  P. Midgley,et al.  Electron tomography and holography in materials science. , 2009, Nature materials.

[18]  Rafal E. Dunin-Borkowski,et al.  Nanoscale analysis of three-dimensional structures by electron tomography , 2006 .

[19]  P. Gilbert.  Iterative methods for the three-dimensional reconstruction of an object from projections. , 1972, Journal of theoretical biology.

[20]  K. Furuya,et al.  Mean free path of inelastic electron scattering in elemental solids and oxides using transmission electron microscopy: Atomic number dependent oscillatory behavior , 2008 .

[21]  L. Reimer.  Electron Energy‐Loss Spectroscopy in the Electron Microscope , 1997 .

[22]  B. Inkson,et al.  Three-dimensional reconstruction of buried nanoparticles by element-sensitive tomography based on inelastically scattered electrons , 2001 .

[23]  Paul A Midgley,et al.  Extending Energy-Filtered Transmission Electron Microscopy (EFTEM) into Three Dimensions Using Electron Tomography , 2003, Microscopy and Microanalysis.

[24]  W. Hoppe,et al.  Protein-Kristallstrukturanalyse mit Elektronenstrahlen , 1968, Naturwissenschaften.

[25]  Z. Saghi,et al.  Electron tomography of regularly shaped nanostructures under non‐linear image acquisition , 2008, Journal of microscopy.

[26]  H. Jinnai,et al.  Transmission electron microtomography without the "missing wedge" for quantitative structural analysis. , 2007, Ultramicroscopy.

[27]  T. Matsui,et al.  Microdomain Morphology in an ABC 3-Miktoarm Star Terpolymer: A Study by Energy-Filtering TEM and 3D Electron Tomography , 2003 .

[28]  P. Midgley,et al.  Four-dimensional spectral tomography of carbonaceous nanocomposites. , 2006, Nano letters.

[29]  J. Martin,et al.  Interactive electron energy-loss elemental mapping by the "Imaging-Spectrum" method , 1992 .

[30]  P. Crozier.  Quantitative elemental mapping of materials by energy-filtered imaging , 1995 .

[31]  C. Kübel,et al.  Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and Semiconductor Applications , 2005, Microscopy and Microanalysis.