Precision design and control of a flexure-based roll-to-roll printing system

Abstract This paper presents the design, characterization, and control of a flexure-based roll-to-roll (R2R) printing system that achieves nanometer level precision and repeatability. The R2R system includes an unwinding/rewinding module, a web guide mechanism, and a core positioning stage consisting of two monolithic compliant X–Y stages that control the position/force of the print roller. During the printing process, capacitance probes, eddy current sensors and load cells are used to monitor the displacements of the flexure stage and contact force in real time. Control strategies, including decoupling, PID, and cascade control, have been implemented to decouple the cross-axis and cross-stage motion coupling effect and improve the overall precision and dynamic performance. In actual printing processes, the contact force and roller position can be uniformly controlled within ±0.05 N and ±200 nm respectively across a 4 in. wide PET web. To demonstrate the performance, a positive microcontact printing (MCP) process is adapted to the R2R system, printing various fine metal patterns, e.g., optical gratings and electrodes, in a continuous fashion.

[1]  Paolo Baldesi,et al.  Design and development of high precision five-axis positioning system for roll-to-roll multi-layer microcontact printing , 2009 .

[2]  L. Guo,et al.  Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting. , 2009, ACS nano.

[3]  David E. Hardt,et al.  Static load-displacement behavior of PDMS microfeatures for soft lithography , 2012 .

[4]  Chung-Yuen Hui,et al.  Constraints on Microcontact Printing Imposed by Stamp Deformation , 2002 .

[5]  L. Guo.  Nanoimprint Lithography : Methods and Material Requirements * , 2007 .

[6]  Stephen Y. Chou,et al.  Imprint of sub-25 nm vias and trenches in polymers , 1995 .

[7]  S. Chou,et al.  Imprint Lithography with 25-Nanometer Resolution , 1996, Science.

[8]  Eun Kyung Lee,et al.  Full-colour quantum dot displays fabricated by transfer printing , 2011 .

[9]  Karl N. Reid,et al.  Lateral Dynamics of an Idealized Moving Web , 1971 .

[10]  Vivek Subramanian,et al.  High‐Performance Printed Transistors Realized Using Femtoliter Gravure‐Printed Sub‐10 μm Metallic Nanoparticle Patterns and Highly Uniform Polymer Dielectric and Semiconductor Layers , 2012, Advanced materials.

[11]  G. Whitesides,et al.  Microcontact printing with a cylindrical rolling stamp: A practical step toward automatic manufacturing of patterns with submicrometer-sized features† , 1996 .

[12]  Su-Ting Han,et al.  Microcontact Printing of Ultrahigh Density Gold Nanoparticle Monolayer for Flexible Flash Memories , 2012, Advanced materials.

[13]  Chung-Yuen Hui,et al.  Effect of stamp deformation on the quality of microcontact printing: theory and experiment. , 2004, Langmuir : the ACS journal of surfaces and colloids.

[14]  George M. Whitesides,et al.  UNCONVENTIONAL NANOFABRICATION , 2004 .

[15]  Joseph E Petrzelka,et al.  Contact region fidelity, sensitivity, and control in roll-based soft lithography , 2012 .

[16]  Huihua Xu,et al.  Flexure-based Roll-to-roll Platform: A Practical Solution for Realizing Large-area Microcontact Printing , 2015, Scientific Reports.

[17]  Shih-Chi Chen,et al.  A FLEXURE-BASED HIGH-THROUGHPUT ROLL-TO-ROLL PRINTING SYSTEM , 2013 .

[18]  Dan J. Gordon,et al.  Precision control of a T-type gantry using sensor/actuator averaging and active vibration damping , 2012 .

[19]  G. Whitesides,et al.  Soft lithography for micro- and nanoscale patterning , 2010, Nature Protocols.

[20]  Thomas F. Edgar,et al.  Process Dynamics and Control , 1989 .

[21]  Chuan Zhao,et al.  Robust and versatile ionic liquid microarrays achieved by microcontact printing , 2014, Nature Communications.

[22]  L. Guo,et al.  High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates , 2008 .

[23]  W. Tsai,et al.  Tunable micropatterned substrates based on poly(dopamine) deposition via microcontact printing. , 2012, Langmuir : the ACS journal of surfaces and colloids.

[24]  G. Whitesides,et al.  Soft Lithography. , 1998, Angewandte Chemie.