A high magnetic coupling, low loss, stacked balun in digital 65nm CMOS

We present a high magnetic coupling, low loss, stacked balun using a thick aluminum bonding metal layer over a thick copper layer. The thick copper is used to realize a differential primary input winding that resides directly underneath a single ended spiral winding using the aluminum. The spiral forms the single ended secondary output of the balun and is rotated by 90° so as to prevent any metal shorting for its cross under. Occupying an area of 0.078mm2 on a digital 65nm process, a 5 turn primary with a 3 turn secondary has a measured coupling of 0.94 and a total balun loss of 1.55dB at 1845MHz.