Ultra-Thin (4nm) Gate-All-Around CMOS devices with High-k/Metal for Low Power Multimedia Applications

J.-L. Huguenin1,2, S. Monfray1, G. Bidal1, S. Denorme1, P. Perreau3,1, N. Loubet1, Y. Campidelli1, M.-P. Samson1,3, C. Arvet1,3, K. Benotmane3, F. Leverd1, P. Gouraud1, B. Le-Gratiet1, C. De-Butet3,1, L. Pinzelli1, R. Beneyton1, S. Barnola3, T. Morel1, A. Halimaoui1,3, F. Boeuf1, G. Ghibaudo2, T. Skotnicki1. 1 ST Microelectronics, 860 rue Jean Monnet, 38926 Crolles, France ; 2IMEP-LAHC, 3 parvis Louis Néel, BP 257, 38016 Grenoble Cedex 1, France ; 3 CEA-LETI 17 rue des Martyrs, 38054 Grenoble, France