论文信息 - Atomic layer deposition of TiO2 from tetrakis(dimethylamino)titanium and H2O - 字舞流文

Atomic layer deposition of TiO2 from tetrakis(dimethylamino)titanium and H2O

D. Meyer | H. Stöcker | M. Vinnichenko | B. Abendroth | Solveig Rentrop | R. Strohmeyer | T. Weling | T. Moebus | Ralph Strohmeyer | Dirk C. Meyer