The ESRF BM05 Metrology Beamline: Instrumentation And Performance Upgrade

The BM05 synchrotron X‐ray beamline has been designed to serve as a test and development station. Recently, new instrumentation has been installed to extend its metrology capability. A monochromatic beam can be produced over an energy range spanning from 6 keV to 100 keV using two Bragg Si(111) flat‐crystal monochromators. It is also possible to install a sagittal crystal (6 keV< E< 30 keV) to concentrate the beam horizontally to 300 μm, therefore increasing the photon density by ∼ 2 orders of magnitude. Alternatively, the beam can be concentrated into micrometer or even sub‐micrometer dimensions by placing a Kirkpatrick‐Baez system very close to the sample under study. A double multilayer monochromator mounted in series with the crystal monochromator(s) can retain a fixed‐exit beam and reduce the amount of harmonics by at least 4 orders of magnitude. When used alone, the multilayer monochromator delivers a high‐flux low‐resolution beam. A first set of (Ru/B4C)70 multilayers has been made with a relativel...