Nonlinear Dynamic Analysis of MEMS Switches by Nonlinear Modal Analysis

A nonlinear modal analysis approach based on the invariant manifoldmethod proposed earlier by Boivin et al. [10] is applied in this paperto perform the dynamic analysis of a micro switch. The micro switch ismodeled as a clamped-clamped microbeam subjected to a transverseelectrostatic force. Two kinds of nonlinearities are encountered in thenonlinear system: geometric nonlinearity of the microbeam associatedwith large deflection, and nonlinear coupling between two energydomains. Using Galerkin method, the nonlinear partial differentialgoverning equation is decoupled into a set of nonlinear ordinarydifferential equations. Based on the invariant manifold method, theassociated nonlinear modal shapes, and modal motion governing equationsare obtained. The equation of motion restricted to these manifolds,which provide the dynamics of the associated normal modes, are solved bythe approach of nonlinear normal forms. Nonlinearities and the pull-inphenomena are examined. The numerical results are compared with thoseobtained from the finite difference method. The estimate for the pull-involtage of the micro device is also presented.

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