Application of AMR sensor in UBM linear scanning probe

According to the ultimate principle of anisotropy magneto resistance(AMR) effect,a non-contact method to measure micro linear displacements of ultrasound transducer in UBM is presented.It collects datas from AMR sensors,using MCU to carry out digital filtering on datas,linear calibration and output control signal via microcontroller PIC16F1827 and hardware circuit that contains AMR sensors.Experiments show that this method has the advantages of high precision and good instantaneity in detecting the displacements of the ultrasound transducer.