Piezoelectric AlN-actuated micro-tuning forks for sensing applications

In this work, we present a detailed study of the first vibration modes of a micro-tuning fork electrically actuated by means of a differential electrode lying on a piezoelectric AlN layer. The actuation through a differential electrode allows the optimal excitation of the modes of interest, including in-plane modes. Lateral and perpendicular displacements have been measured for a complete characterization of the resonator. Promising results have been obtained, including high values of the quality factor, which reach values above 4300 in air for the anti-phase in-plane modes.