Real-time phase step measurement using the volume enclosed by a surface algorithm in self-calibrating phase-shifting interferometry

Abstract This manuscript presents a simple, and very efficient method capable of measuring in real-time the phase steps from an interferogram varying with the time. Within a range ( 0 , 2 π ) given by the phase steps of two fixed reference interferograms. The phase differences among the dynamic and reference interferograms are computed by an algorithm of type self-calibrating generalized phase-sifting interferometry based on geometric concept of volume enclosed by a surface. This proposal has the property to accept or reject the measured data, and its calibration process is very easy, which are very important advantages, so it is a very practical method. Theoretical model is described, verified with a numerical simulation, and applied to measure experimentally the phase steps in three optical tables with different conditions.

[1]  J Vargas,et al.  Phase-shifting interferometry based on principal component analysis. , 2011, Optics letters.

[2]  C. Rathjen,et al.  Statistical properties of phase-shift algorithms , 1995 .

[3]  C. Meneses-Fabian Self-calibrating generalized phase-shifting interferometry of three phase-steps based on geometric concept of volume enclosed by a surface , 2016 .

[4]  S. W. Kim,et al.  Numerical correction of reference phases in phase-shifting interferometry by iterative least-squares fitting. , 1994, Applied optics.

[5]  Michael A. Player,et al.  Phase step measurement and variable step algorithms in phase-shifting interferometry , 1992 .

[6]  Ibrahim Abdulhalim,et al.  Real-time phase shift interference microscopy. , 2014, Optics letters.

[7]  Theo Neger,et al.  Digital evaluation of interferograms , 2004 .

[8]  C. J. Morgan Least-squares estimation in phase-measurement interferometry. , 1982, Optics letters.

[9]  T. Yatagai,et al.  Generalized phase-shifting interferometry , 1991 .

[10]  J. Bokor,et al.  Fourier-transform method of phase-shift determination. , 2001, Applied optics.

[11]  Seah Hock Soon,et al.  Phase-shifting windowed Fourier ridges for determination of phase derivatives. , 2003, Optics letters.

[12]  T. Eiju,et al.  Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. , 1987, Applied optics.

[13]  M. Pisani,et al.  An acoustic thermometer for air refractive index estimation in long distance interferometric measurements , 2018 .

[14]  Chris L. Koliopoulos,et al.  Fourier description of digital phase-measuring interferometry , 1990 .

[15]  X Chen,et al.  Phase-shifting interferometry with uncalibrated phase shifts. , 2000, Applied optics.

[16]  John E. Greivenkamp,et al.  Generalized Data Reduction For Heterodyne Interferometry , 1984 .

[17]  K. Creath V Phase-Measurement Interferometry Techniques , 1988 .

[18]  K Larkin,et al.  A self-calibrating phase-shifting algorithm based on the natural demodulation of two-dimensional fringe patterns. , 2001, Optics express.

[19]  Bijan Shirinzadeh,et al.  The measurement uncertainties in the laser interferometry-based sensing and tracking technique , 2002 .

[20]  L. Deck,et al.  Vibration-resistant phase-shifting interferometry. , 1996, Applied optics.

[21]  K. Hibino,et al.  Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts , 1997 .

[22]  Kenneth E. Hrdina,et al.  An old material finds a new application , 2002 .

[23]  D. J. Brangaccio,et al.  Digital wavefront measuring interferometer for testing optical surfaces and lenses. , 1974, Applied optics.

[24]  Jianjun Cui,et al.  Precision measurement of the refractive index of air using a phase modulated homodyne interferometer with a variable length vacuum cavity , 2019, Measurement Science and Technology.

[25]  Weirui Zhao,et al.  A real-time adaptive phase-shifting interferometry , 2012, Other Conferences.

[26]  Bongtae Han,et al.  Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms. , 2004, Optics letters.

[27]  S. Guha,et al.  Measurement of the index of refraction of a flat zinc germanium phosphide wafer in the infrared , 2003, Conference on Lasers and Electro-Optics (CLEO).

[28]  J. Schwider,et al.  IV Advanced Evaluation Techniques in Interferometry , 1990 .

[29]  L. Cai,et al.  Phase-shift extraction and wave-front reconstruction in phase-shifting interferometry with arbitrary phase steps. , 2003, Optics letters.

[30]  Chris L. Koliopoulos,et al.  Simultaneous phase-shift interferometer , 1992, Optics & Photonics.