Development of a High‐Resolution CT System and 3D Data Visualization Tools

The need for material characterization covers broad areas including new materials development, failure analysis, biomedical applications and process development and characterization. Length scales of 0.1μ through 500μ are of key importance to if processes are to be understood and a measure of control on those processes achieved. Computed tomography (CT) imaging of objects is increasingly important in that it can provide 3D information nondestructively about the internal features of interest. We present results from a recently developed μCT system based on a 130 kVp microfocus tube, an amorphous Si array detector and a micro‐stepped positioner. At present the highest resolutions available are voxel sizes of 2.5 microns with a field of view of 4 mm. The data volumes are several gigabytes and have 1400×1400×500voxels. Larger fields of view can be obtained at lower resolution. In generating these 3D data sets a number of issues need to be addressed including detector noise and artifacts, transfer of data from...