Reliability in Stacked Gate-All-Around Si Nanowire Devices: Time-Dependent Variability and Full Degradation Mapping
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H. Mertens | R. Ritzenthaler | A. Chasin | N. Horiguchi | D. Linten | G. Rzepa | B. Kaczer | J. Franco | P. Weckx | E. Bury | V. Putcha