A Novel Cupped Solid-State Wave Gyroscope

Aiming at improving the Q-factor and simplifying the fabricating process of the cupped solid-state wave Gyroscope, a novel cupped solid-state wave gyroscope based on piezoelectric effect is presented in this paper. The sensor has a novel cupped metallic resonator comprises of a cone shell and eight thin flat beams. The working principle of the gyroscope is validated by FEM. Compared with conventional solid-stated gyroscopes, the novel structural features improve the Q-factor and simplify the fabricating process of the gyroscope. The prototypal gyroscope is fabricated and tested, the work mode frequency is about 3979Hz, and the Q-factor is over 8000 in atmosphere. The side-lobes in the output signal’s FFT curve validate the novel design scheme.

[1]  Nader Jalili,et al.  Ring Microgyroscope Modeling and Performance Evaluation , 2006 .

[2]  Philip Wayne Loveday,et al.  Analysis and Compensation of Imperfection Effects in Piezoelectric Vibratory Gyroscopes , 1999 .

[3]  T. Sviridova,et al.  A description of electrostatic ring gyroscope , 2008, 2008 International Conference on Perspective Technologies and Methods in MEMS Design.

[4]  V.V. Chikovani,et al.  A set of high accuracy low cost metallic resonator CVG , 2007, 2008 IEEE/ION Position, Location and Navigation Symposium.

[5]  Mykhaylo Lobur,et al.  Electrostatic ring gyroscope investigation , 2009, 2009 10th International Conference - The Experience of Designing and Application of CAD Systems in Microelectronics.

[6]  W. S. Watson,et al.  Vibratory gyro skewed pick-off and driver geometry , 2010, IEEE/ION Position, Location and Navigation Symposium.

[7]  Nader Jalili,et al.  Ring Microgyroscope Modeling and Performance Evaluation , 2005 .