论文信息 - Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering - 字舞流文

Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering

Xiao-Hong Xu | Hai-Shun Wu | Hai-Shun Wu | Xiao-hong Xu | Zhihao Jin | Cong-Jie Zhang | Zhi-Hao Jin | Cong-Jie Zhang | Z. Jin

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