Initial growth and texture formation during reactive magnetron sputtering of TiN on Si(111)
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Hiroshi Komiyama | Suguru Noda | Yoshiko Tsuji | Toshio Ohsawa | S. Noda | H. Komiyama | Tu-Qiang Li | Y. Tsuji | Tu-Qiang Li | Toshio Ohsawa
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