Evaluation of Interfacial Nitrogen Concentration of RTP Oxynitrides by Reoxidation

We prepared oxynitrides with different interfacial nitrogen concentration ([N int ]) using RTP. Reoxidation kinetics of these oxynitrides was studied. It was found that reoxidation thickness strongly depends on the [N int ]. The reoxidation kinetics can be used for the evaluation of [N int ]