Silicon-based ultrasonic surgical actuators
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A novel ultrasonic biomedical actuator technology fabricated using micromachining and piezoelectric ceramics is presented. Advantages and limitations of micromachining technology in the context of biomedical actuators are outlined. Micromachining allows the fabrication of extremely small devices with integrated electronics. Silicon's material properties make it ideal for high-intensity ultrasonic applications. Cutting tip velocity and sharpness were shown to be superior to that of conventional ultrasonic surgical tool technology.
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