New Current Drive Method to Extend the Stable Operation Range of Electrostatic Actuators: Experimental Verification

This paper presents a new current driving method for electrostatic actuators. The method is conceptually introduced and experimentally tested showing that the stable range of movement can be extended for positions after the well-known voltage pull-in instability. Position of the movable plate is controlled injecting the required amount of charge, defined by the amplitude and duration of a current pulse. Undesired leakage currents are taken into account resetting the charge periodically, returning the movable electrode to the designed position.