论文信息 - High-resolution integrated spectrometers in silicon-oxynitride

High-resolution integrated spectrometers in silicon-oxynitride

Arrayed waveguide grating spectrometers operating around 800 nm and 1300 nm are demonstrated, with the highest resolution (0.16 nm) and largest free spectral range (77 nm) achieved in silicon-oxynitride technology to date.

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