Mid-infrared photonic crystal cavities in silicon.

We demonstrate the design, fabrication, and characterization of silicon photonic crystal cavities realized in a silicon on insulator (SOI) platform, operating at a wavelength of 4.4 μm with a quality factor of 13,600. Cavity modes are imaged using the technique of scanning resonant scattering microscopy. To the best of our knowledge, this is the first demonstration of photonic devices fabricated in SOI and operating in the 4-5 μm wavelength range.

[1]  T. Asano,et al.  High-Q photonic nanocavity in a two-dimensional photonic crystal , 2003, Nature.

[2]  Jeff F. Young,et al.  Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities , 2005 .

[3]  T. Baehr‐Jones,et al.  Silicon-on-sapphire integrated waveguides for the mid-infrared. , 2009, Optics express.

[4]  B. Jalali,et al.  Demonstration of a Mid-infrared silicon Raman amplifier. , 2007, Optics express.

[5]  P. Deotare,et al.  High quality factor photonic crystal nanobeam cavities , 2009, 0901.4158.

[6]  Bahram Jalali,et al.  Silicon photonics: Nonlinear optics in the mid-infrared , 2010 .

[7]  Thomas F. Krauss,et al.  Light scattering and Fano resonances in high-Q photonic crystal nanocavities , 2009 .

[8]  Richard A. Soref,et al.  Silicon waveguided components for the long-wave infrared regionThis article was submitted to the spe , 2006 .

[9]  P. Hemmer,et al.  A diamond nanowire single-photon source. , 2009, Nature nanotechnology.

[10]  Sanja Zlatanovic,et al.  Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source , 2010 .

[11]  R. Soref.  Mid-infrared photonics in silicon and germanium , 2010 .

[12]  Yang Liu,et al.  Silicon waveguides and ring resonators at 5.5 µm , 2010 .

[13]  Yurii A. Vlasov,et al.  Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides , 2010, 1001.1533.

[14]  Masaya Notomi,et al.  Optical bistable switching action of Si high-Q photonic-crystal nanocavities. , 2005, Optics express.

[15]  Candice Tsay,et al.  Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides. , 2010, Optics express.