论文信息 - Finite Element Based Macromodeling of Drag-Force Flowmeter

Finite Element Based Macromodeling of Drag-Force Flowmeter

The paper is concerned with an advanced simulation method based on FEM for extract lumped and integrated parameters, which describing a behaviour of the drag-force gas flowmeter. The macromodel of the drag-force flowmeter based on obtained results have been developed and compared with experimental data. This model can be used for an estimation static characteristic of flowmeter and circuit level simulations.

V.A. Kolchuzhin | V.A. Gridchin | V. A. Gridchin | V. Kolchuzhin

[1] A. Evans,et al. Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing , 1996 .

[2] Göran Stemme,et al. A new silicon gas-flow sensor based on lift force , 1998 .

[3] S. Senturia. Microsystem Design , 2000 .

[4] Amit Lal,et al. In-channel micromechanical drag flow sensor with electronic readout , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[5] R. W. Miller,et al. Flow Measurement Engineering Handbook , 1983 .

[6] Jack Chen,et al. Institute of Physics Publishing Journal of Micromechanics and Microengineering Design and Fabrication of Artificial Lateral Line Flow Sensors 1. Underwater Flow Sensing , 2022 .

[7] Ernst Obermeier,et al. A micro surface fence probe for the application in flow reversal areas , 2002 .