Testing a New Electron Microprobe and Developing New Analytical Protocols
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Since the development of the first electron probe microanalyzer (EPMA) [1], hardware and software have evolved considerably. Nowadays, it is possible to achieve high stability, precision and accuracy. Field emission (FE-) EPMA opens the door to sub-micron analysis at low (over-) voltage, the large-area monochromator and higher stability permit trace element analysis down to 1-10 ppm range, and Energy Dispersive Spectrometers (EDS) enable fast mineral identification, hyperspectral mapping, and good (standard-based) quantitative work. As the precision and stability of the instrument improve, more sensitive tests must be developed to ensure high quality analysis. This paper is an overview of the optimization and quality control of a new EPMA, and discusses the development of new analytical protocols, focusing on trace element analysis.
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[3] T. Tingle,et al. An Improved Mean Atomic Number Background Correction for Quantitative Microanalysis , 1996, Microscopy and Microanalysis.