Guided mode resonance enabled ultra-compact Germanium photodetector for 1.55 μm detection.

We propose a novel technique of enhancing the photodetection capabilities of ultrathin Ge films for normally incident light at 1.55 μm through the guided mode resonance (GMR) phenomenon. Specifically, by suitably patterning the surface of a Ge thin film, it is possible to excite guided modes which are subsequently coupled to free space radiative modes, resulting in spectral resonances that possess locally enhanced near fields with a large spatial extent. Absorption is found to be enhanced by over an order of magnitude over a pristine Ge film of equal thickness. Furthermore, attenuation of incident light for such a structure occurs over very few grating periods, resulting in significantly enhanced theoretical 3 dB bandwidth-efficiency products of ~58 GHz. The nature of the enhancement mechanism also produces spectrally narrow resonances (FWHM ~30 nm) that are polarization sensitive and exhibit excellent angular tolerance. Finally, the proposed device architecture is fully compatible with existing Si infrastructure and current CMOS fabrication processes.

[1]  J. Muszalski,et al.  Resonant cavity enhanced photonic devices , 1995 .

[2]  N. Feng,et al.  Vertical p-i-n germanium photodetector with high external responsivity integrated with large core Si waveguides. , 2010, Optics express.

[3]  D. C. Houghton,et al.  Growth and characterization of Si1−xGex and Ge epilayers on (100) Si , 1988 .

[4]  Adriana Szeghalmi,et al.  Theoretical and Experimental Analysis of the Sensitivity of Guided Mode Resonance Sensors , 2010 .

[5]  D. D. Cannon,et al.  High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation , 2005, IEEE Photonics Technology Letters.

[6]  D. Whittaker,et al.  Scattering-matrix treatment of patterned multilayer photonic structures , 1999 .

[7]  X. Le Roux,et al.  Germanium photodetector integrated in a Silicon-On-Insulator microwaveguide , 2007, 2007 4th IEEE International Conference on Group IV Photonics.

[8]  M.K. Emsley,et al.  High-speed resonant-cavity-enhanced silicon photodetectors on reflecting silicon-on-insulator substrates , 2002, IEEE Photonics Technology Letters.

[9]  Kazumi Wada,et al.  High-quality Ge epilayers on Si with low threading-dislocation densities , 1999 .

[10]  Gmw Gerrit Kroesen,et al.  Studies of the reactive ion etching of SiGe alloys , 1991 .

[11]  Jörg Schulze,et al.  Germanium-tin p-i-n photodetectors integrated on silicon grown by molecular beam epitaxy , 2011 .

[12]  Y. Akimov,et al.  Enhancement of optical absorption in thin-film solar cells through the excitation of higher-order nanoparticle plasmon modes. , 2009, Optics express.

[13]  Chaoyang Wei,et al.  Electric field enhancement in guided-mode resonance filters. , 2006, Optics letters.

[14]  Guo-Qiang Lo,et al.  Waveguide-integrated near-infrared detector with self-assembled metal silicide nanoparticles embedded in a silicon p-n junction , 2012 .

[15]  K. Alameh,et al.  Optical absorption enhancement of hybrid-plasmonic-based metal-semiconductor-metal photodetector incorporating metal nanogratings and embedded metal nanoparticles. , 2013, Optics express.

[16]  Villeneuve,et al.  Photonic band gaps in two-dimensional square and hexagonal lattices. , 1992, Physical review. B, Condensed matter.

[17]  G. Masini,et al.  Ge/Si (001) Photodetector for Near Infrared Light , 1997 .

[18]  S Tibuleac,et al.  High-efficiency guided-mode resonance filter. , 1998, Optics letters.

[19]  Albert Polman,et al.  Design principles for particle plasmon enhanced solar cells , 2008 .

[20]  Lambertus Hesselink,et al.  C-shaped nanoaperture-enhanced germanium photodetector. , 2006, Optics letters.

[21]  J. Michel,et al.  High-performance Ge-on-Si photodetectors , 2010 .

[22]  P. Crozat,et al.  42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide. , 2009, Optics express.

[23]  Guo-Qiang Lo,et al.  Low Thermal Budget Monolithic Integration of Evanescent-Coupled Ge-on-SOI Photodetector on Si CMOS Platform , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[24]  R. Magnusson,et al.  New principle for optical filters , 1992 .

[25]  Steven G. Johnson,et al.  Integrated photonic structures for light trapping in thin-film Si solar cells , 2012 .

[26]  S. S. Wang,et al.  Theory and applications of guided-mode resonance filters. , 1993, Applied optics.

[27]  Edward S. Barnard,et al.  Design of Plasmonic Thin‐Film Solar Cells with Broadband Absorption Enhancements , 2009 .

[28]  K. Catchpole,et al.  Plasmonic solar cells. , 2008, Optics express.

[29]  P Waldron,et al.  Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing. , 2009, Optics express.

[30]  Frederic Allibert,et al.  Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices , 2006 .

[31]  Yasha Yi,et al.  Efficiency enhancement in Si solar cells by textured photonic crystal back reflector , 2006 .

[32]  K. Saraswat,et al.  Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna , 2008 .

[33]  C. Schow,et al.  Resonant-cavity-enhanced high-speed Si photodiode grown by epitaxial lateral overgrowth , 1999, IEEE Photonics Technology Letters.

[34]  Harry A Atwater,et al.  Large integrated absorption enhancement in plasmonic solar cells by combining metallic gratings and antireflection coatings. , 2011, Nano letters.

[35]  Pengyu Fan,et al.  Resonant germanium nanoantenna photodetectors. , 2010, Nano letters.