Development of Master-Slave System for Magnetic Levitation

Abstract Precise works and manipulating micro objects are afflictive for operators both mentally and physically. To execute these jobs smoothly without feeling wrongness, use of master-slave systems is preferable because position and force are able to be scaled up and down under the systems. In our study we develop a master-slave system whose slave robot is micro and levitated by magnetic forces. The distinction of the levitated robot is that it does not get any other contact forces from outside. Thus we introduce a method using an impedance model for constructing the master-slave system. We confirmed the effectiveness of the positioning control algorithm through experiments.