论文信息 - Performance and leakage optimization in carbon and fluorine co-implanted pMOSFETs - 字舞流文

Performance and leakage optimization in carbon and fluorine co-implanted pMOSFETs

P. Absil | S. Biesemans | T. Hoffman | J. Hooker | P. Eyben | R. Duffy | B. Pawlak | R. Lander | S. Felch