Comparison study of algorithms and accuracy in the wavelength scanning interferometry.

Wavelength scanning interferometry (WSI) can be used for surface measurement with discontinuous surface profiles by producing phase shifts without any mechanical scanning process. The choice of algorithms for the WSI to analyze the fringe pattern depends on the desired accuracy and computing speed. This paper provides comparison of four different algorithms to analyze the interference fringe pattern acquired from WSI. The mathematical description of these algorithms, their computing resolution, and speed are presented. Two step-height samples are measured using the WSI. Experimental results demonstrate that the accuracy of measuring surface height varies from micrometer to nanometer value depending on the algorithm used to analyze the captured interferograms.

[1]  Jon W. Carnahan,et al.  Characterization of an Acousto-Optic Tunable Filter and Use in Visible Spectrophotometry , 1999 .

[2]  J. J. Snyder,et al.  Algorithm for fast digital analysis of interference fringes. , 1980, Applied optics.

[3]  David J. Whitehouse,et al.  Handbook of Surface and Nanometrology , 2002 .

[4]  Yukihiro Ishii,et al.  Wavelength-Tunable Laser-Diode Interferometer , 1999 .

[5]  M. Takeda,et al.  Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces. , 1994, Applied optics.

[6]  T. Pfeifer,et al.  Interferometric measurement of absolute distances of up to 40 m , 1995 .

[7]  Feng Gao,et al.  Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. , 2010, Applied optics.

[8]  H. Kikuta,et al.  Distance measurement by the wavelength shift of laser diode light. , 1986, Applied optics.

[9]  J Schwider,et al.  Dispersive interferometric profilometer. , 1994, Optics letters.

[10]  I. Yamaguchi,et al.  Wavelength scanning profilometry for real-time surface shape measurement. , 1997, Applied optics.

[11]  Jim Kramer,et al.  Determination of fringe order in white-light interference microscopy. , 2002, Applied optics.

[12]  David J. Whitehouse,et al.  Handbook of Surface and Nanometrology, Second Edition , 2011 .

[13]  S. Wada,et al.  Surface Shape Measurement by Wavelength Scanning Interferometry Using an Electronically Tuned Ti:sapphire Laser , 2001 .

[14]  Simultaneous wavenumber measurement and coherence detection using temporal phase unwrapping. , 2012, Applied optics.

[15]  M. Takeda,et al.  Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry , 1982 .

[16]  Dai Xiaoli,et al.  High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry , 1998 .