论文信息 - MSM photodetector with an integrated microlens array for improved optical coupling

MSM photodetector with an integrated microlens array for improved optical coupling

We describe the fabrication of an array of integrated cylindrical microlenses on top of a single GaAs MSM photodetector. Preliminary experimental data already shows an increase of about 11% on the photocurrent of the MSM photodiode as a result of the improved optical coupling efficiency. However ray-tracing calculations indicate that this increase can reach values as high as 50% with a more careful lens design.

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