Integrated tool for fabrication of electronic components by laser direct write

A prototype workstation has been developed that allows the fabrication of passive electronic components at low temperatures using a laser direct-write process. The work station combines a variety of laser processing techniques onto a single, integrated platform. These techniques include material deposition, laser micromachining, laser sintering, and laser trimming. One particular process, referred to as 'mill and fill', combines the laser micromachining ability of the tool with 'off-the-shelf' conductor pastes to allow the fabrication of high density metalization at very low temperatures. The present work describes the details of the 'mill and fill' process and shows examples of prototype devices fabricated using this technique.