A Large-Displacement 3-DOF Flexure Parallel Mechanism with Decoupled Kinematics Structure

This paper proposes an XYZ-flexure parallel mechanism (FPM) with large displacement and decoupled kinematics structure. The large-displacement FPM has large motion range more than 1 mm. Moreover, the decoupled XYZ-stage has small cross-axis error and small parasitic rotation. In this study, the typical prismatic joints are investigated, and a new large-displacement prismatic joint using notch hinges is designed. The conceptual design of the FPM is proposed by assembling these modular prismatic joints, and then the optimal design of the FPM is conducted. The analytical models of linear stiffness and dynamics are derived using pseudo-rigid-body (PRB) method. Finally, the numerical simulation using ANSYS is conducted for modal analysis to verify the analytical dynamics equation. Experiments are conducted to verify the proposed design for linear stiffness, cross-axis error and parasitic rotation

[1]  Kee S. Moon,et al.  Optimal design of a flexure hinge based XYφ wafer stage , 1997 .

[2]  Kee S. Moon,et al.  Inverse kinematic modeling of a coupled flexure hinge mechanism , 1999 .

[3]  Chung Kai Tseng,et al.  An Ultra-Precision XYΘ Z Piezo-Micropositioner Part II : Experiment and Performance , 1999 .

[4]  Nicolae Lobontiu,et al.  Compliant Mechanisms: Design of Flexure Hinges , 2002 .

[5]  J. M. Paros,et al.  Flexure Pivots to Replace Knife Edge and Ball Bearing , 1965 .

[6]  Qingsong Xu,et al.  Kinematic Design of a Novel 3-DOF Compliant Parallel Manipulator for Nanomanipulation , 2005, AIM 2005.

[7]  Il Hong Suh,et al.  Design and experiment of a 3 DOF parallel micro-mechanism utilizing flexure hinges , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[8]  Jerry Hamann,et al.  Control of flexure jointed hexapods , 1999, Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No.99CH36304).

[9]  Seung-Woo Kim,et al.  An ultraprecision stage for alignment of wafers in advanced microlithography , 1997 .

[10]  Reymond Clavel,et al.  Study of the sources of inaccuracy of a 3 DOF flexure hinge-based parallel manipulator , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[11]  J. Paros.  How to design flexure hinges , 1965 .

[12]  L-W. Tsai,et al.  Kinematics and Workspace of a Novel Three DOF Translational Platform , 1996 .

[13]  S H Chang,et al.  An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[14]  Feng Gao,et al.  On the design of 6-DOF parallel micro-motion manipulators , 2001, Proceedings 2001 IEEE/RSJ International Conference on Intelligent Robots and Systems. Expanding the Societal Role of Robotics in the the Next Millennium (Cat. No.01CH37180).

[15]  Stuart T. Smith,et al.  Flexures: Elements of Elastic Mechanisms , 2000 .

[16]  Tatsuo Arai,et al.  Development of 3 DOF micro finger , 1996, Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems. IROS '96.

[17]  Zong Guanghua,et al.  Design of a 6-DOF compliant manipulator based on serial-parallel architecture , 2005, Proceedings, 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics..

[18]  S. Kim,et al.  Development of a piezoelectric actuator using a three-dimensional bridge-type hinge mechanism , 2003 .