An Ultra-Precision XYθZ Piezo-Micropositioner Part I: Design and Analysis

A novel three degree-of-freedom microposi­ tioner was developed for deep ultraviolet lithography ap­ plications. The design of the micropositioner utilizes the monolithic flexural mechanism with the built-in multilayer piezoelectric actuators and the sensors to achieve the trans­ lations in the Xand Y-axes and rotation in the 8Z -axis. The compact design aims at high resolution, high stiffness, and extremely low crosstalk interference. Parametric analyses of harmonic and forced vibrations are conducted to solve the derived dynamic models for the near optimum geome­ try of the micropositioner. Furthermore, the error budget analysis is conducted to minimize the effects of the geo­ metric tolerance, material variation, and hysteresis errors.