论文信息 - Coating, Mechanical Constraints, and Pressure Effects on Electromigration - 字舞流文

Coating, Mechanical Constraints, and Pressure Effects on Electromigration

The effect of the mechanical constraints exerted by coatings upon electromigration in thin films is evaluated on the basis of known pressure effects upon diffusion.

Oliver C. Wells | F. d'Heurle | O. Wells | F. M. d’Heurle | N. G. Ainslie | N. Ainslie

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