论文信息 - Sealing of hard CrN and DLC coatings with atomic layer deposition. - 字舞流文

Sealing of hard CrN and DLC coatings with atomic layer deposition.

M. Ritala | G. Radnóczi | I. Kolev | J. Światowska | P. Marcus | A. Seyeux | M. Fenker | V. Maurice | E. Härkönen | B. Díaz | L. Tóth | M. Vehkamäki