Experimental investigation of machinability and surface quality of sapphire machined with polycrystalline diamond micro-milling tool

Ultra-precision machining of single crystalline sapphire was performed using a polycrystalline diamond (PCD) micro-milling tool. Examination of the machining characteristics indicates that a high-quality surface with a nanometre-scale surface roughness can be obtained when the removed chips are thin enough to achieve ductile-mode machining. Although a high-quality surface was successfully machined, the surface roughness gradually deteriorated and the actual depth of the machined groove became shallower as the machining distance increased because of the build-up of material adhering to the surface of the tool. To retain the milling capabilities of the PCD tool, an electrochemical-assisted surface reconditioning process has been proposed. The reconditioning technique was found to be effective in removing the surface contaminant without causing damage to the edges of the tool.

[1]  T. Moriwaki,et al.  Precision Cutting of Aspherical Ceramic Molds with Micro PCD Milling Tool , 2007 .

[2]  Zone-Ching Lin,et al.  A study of material removal amount of sapphire wafer in application of chemical mechanical polishing with different polishing pads , 2012 .

[3]  Fritz Klocke,et al.  Removal mechanisms in polishing of silicon based advanced ceramics , 2009 .

[4]  D. Axinte,et al.  On the influence of single grit micro-geometry on grinding behavior of ductile and brittle materials , 2013 .

[5]  Sangkee Min,et al.  Recent Advances in Mechanical Micromachining , 2006 .

[6]  Kazuo Yamazaki,et al.  A study on the quality of micro-machined surfaces on tungsten carbide generated by PCD micro end-milling , 2012 .

[7]  Kai Cheng,et al.  Micro-Cutting: Fundamentals and Applications , 2013 .

[8]  Eric R. Marsh,et al.  Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining , 2004 .

[9]  K. Yamazaki,et al.  A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining , 2011 .

[10]  Tsunemoto Kuriyagawa,et al.  Tool wear control in diamond turning of high-strength mold materials by means of tool swinging , 2010 .

[11]  Dragos Axinte,et al.  Solid diamond micro-grinding tools: From innovative design and fabrication to preliminary performance evaluation in Ti–6Al–4V , 2012 .

[12]  Yadong Gong,et al.  Experimental study on ductile-regime micro-grinding character of soda-lime glass with diamond tool , 2013 .

[13]  Yadong Gong,et al.  Grinding forces in micro slot-grinding (MSG) of single crystal sapphire , 2017 .

[14]  L. T. Harper,et al.  A study of an improved cutting mechanism of composite materials using novel design of diamond micro-core drills , 2015 .