A vertically integrated micromachined filter

A 10-GHz filter constructed of slot-coupled micromachined cavities in silicon is presented. The novel character of the filter lies in its structure, which consists of a microstrip feed to cavities via slot apertures and three vertically stacked slot-coupled cavities. The cavities are essentially reduced-height waveguide resonators. The measured results are presented and compared to a finite-element-method model. The simulated model has a bandwidth of 4% with an insertion loss of 0.9 dB at 10.02 GHz. The measured filter yields a 3.7% bandwidth with a deembedded insertion loss of 2.0 dB at 10.01 GHz. Various loss mechanisms are examined to explain the difference between simulated and measured insertion loss.

[1]  R. Collin.  Foundations for microwave engineering , 1966 .

[2]  E. M. Jones,et al.  Microwave Filters, Impedance-Matching Networks, and Coupling Structures , 1980 .

[3]  K. A. Zaki,et al.  Coupling of Non-Axially Symmetric Hybrid Modes in Dielectric Resonators , 1987 .

[4]  D. Pozar.  Microwave Engineering , 1990 .

[5]  van Deventer,et al.  Characterization of Two-Dimensional High Frequency Microstrip and Dielectric Interconnects. , 1992 .

[6]  Y. Tai,et al.  Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies , 1993, IEEE Microwave and Guided Wave Letters.

[7]  G.M. Rebeiz,et al.  Micromachined self-packaged W-band bandpass filters , 1995, Proceedings of 1995 IEEE MTT-S International Microwave Symposium.

[8]  Gabriel M. Rebeiz,et al.  A 250-GHz microshield bandpass filter , 1995, IEEE Microwave and Guided Wave Letters.

[9]  G.M. Rebeiz,et al.  A low-loss 20 GHz micromachined bandpass filter , 1995, Proceedings of 1995 IEEE MTT-S International Microwave Symposium.

[10]  Jiasheng Hong,et al.  Couplings of microstrip square open-loop resonators for cross-coupled planar microwave filters , 1996 .

[11]  J. Papapolymerou,et al.  A micromachined high-Q X-band resonator , 1997 .

[12]  John Papapolymerou,et al.  The effects of slot positioning on the bandwidth of a micromachined resonator , 1998, 1998 28th European Microwave Conference.

[13]  Gabriel M. Rebeiz,et al.  Micromachined micropackaged filter banks , 1998 .

[14]  Gabriel M. Rebeiz,et al.  Low loss micromachined filters for millimeter-wave telecommunication systems , 1998, 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192).

[15]  S. Fujita,et al.  K-band receiver front-end IC integrating micromachined filter and flip-chip assembled active devices , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[16]  Gabriel M. Rebeiz,et al.  A wideband CPW-to-microstrip transition for millimeter-wave packaging , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[17]  Linda P. B. Katehi,et al.  RF W-band wafer-to-wafer transition , 2000, IEEE MTT-S International Microwave Symposium Digest.

[18]  W-Band Three-Dimensional Integrated Circuits Utilizing Silicon Micromachining , 2000 .

[19]  Richard W. Ziolkowski,et al.  High-Q micromachined resonant cavities in a K-band diplexer configuration , 2001 .