论文信息 - Energy Harvesting in the Back-End of Line with CMOS Compatible Ferroelectric Hafnium Oxide - 字舞流文

Energy Harvesting in the Back-End of Line with CMOS Compatible Ferroelectric Hafnium Oxide

W. Weinreich | R. Seidel | S. Eßlinger | S. Kolodinski | L. Eng | M. Czernohorsky | T. Kämpfe | M. Rudolph | K. Kühnel | D. Lehninger | S. Oehler | C. Mart | M. Wiatr | S. Abdulazhanov | K. Falidas