论文信息 - Time-frequency analysis assisted reconstruction of ruthenium optical constants in the sub-EUV spectral range 8 nm – 75 nm - 字舞流文

Time-frequency analysis assisted reconstruction of ruthenium optical constants in the sub-EUV spectral range 8 nm – 75 nm

Jena | Belgium | H Germany | V. Philipsen | Berlin | C. Laubis | Leuven | Imec | V. Soltwisch | P. Naujok | A. Andrle | C. Stadelhoff | Philipp Honicke | Q. Saadeh | H. Mentzel | C. Buchholz | Anja Schonstedt | Frank Scholze Physikalisch-Technische Bundesanstalt | OptiX fab GmbH