Laser thin film ablation with multiple beams and tailored beam profiles

For thin film ablation one can often not take full advantage of the relatively high output power and high pulse energy of lasers. A solution might be the use of parallel processing technique with multiple beams which help to increase process speed and to save process costs. Within this contribution we demonstrate thin film scribing of GZO and ITO which shows the potential of parallel processing combined with Top-hat beam shaping. The beam shaping optic provides process optimized beam profiles leading to a more efficient process and an improved ablation quality.