Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator

This paper demonstrates the feasibility of a novel fabrication approach of MEMS resonators above standard CMOS circuitry and with zero-level vacuum package. As a proof of concept a monolithical CMOS-MEMS-closed loop oscillator showing dual-clock capabilities (11.9 MHz and 24.5 MHz) is presented. These two frequencies correspond to two different resonator modes, specifically the torsional and vertical out of plane, of a paddle shaped MEMS resonator.

[1]  Chi-Hang Chin,et al.  Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators , 2013, 2013 IEEE International Electron Devices Meeting.

[2]  Chengjie Zuo,et al.  Dual-Mode Resonator and Switchless Reconfigurable Oscillator Based on Piezoelectric AlN MEMS Technology , 2011, IEEE Transactions on Electron Devices.

[3]  É. Colinet,et al.  Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[4]  A. Uranga,et al.  A 3V CMOS-MEMS oscillator in 0.35μm CMOS technology , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[5]  J. Lahann,et al.  Fully monolithic CMOS nickel micromechanical resonator oscillator , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[6]  Arantxa Uranga,et al.  CMOS-MEMS resonators , 2015 .

[7]  Robert Puers,et al.  A review of MEMS oscillators for frequency reference and timing applications , 2011 .

[8]  T. A. Hill,et al.  Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.